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Keeping Opti-Probe
Systems Running

Independent service, calibration, repair, replacement parts, and refurbished systems for Therma-Wave Opti-Probe metrology equipment.

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Service & Repair

Expert diagnostics, repair,

and calibration for legacy

Opti-Probe systems.

Learn More  →

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Replacement Parts

OEM and high-quality 

refurbished parts for

hard-to-find components.

Browse Parts  →

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Complete Systems

Refurbished Opti-Probe

systems tested and ready

for production.

View Systems  →

Harris Metrology Independent Service • Parts • Refurbishment

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Home | Service | Parts | Complete Systems | About | Contact

 

bill@harrismetrology.com

service@harrismetrology.com

 

© 2026 Harris Metrology. All Rights Reserved.

 

Harris Metrology is an independent provider of service, calibration, replacement parts, and refurbished equipment for legacy Therma-Wave Opti-Probe® systems. Harris Metrology is not affiliated with or endorsed by Therma-Wave, KLA Corporation, or their respective successors. Therma-Wave® and Opti-Probe® are trademarks of their respective owners.

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